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Cleaning Glass Slides for Silane Coating

Q. I am developing a new cleaning process to replace the process we are using for cleaning glass slides before applying Silane coating. We are using strong acid to clean glass slides. I want to use a process where I first use basic aqueous solution, then use DI water to rinse, followed by acidic solution to chelate away metal ions. Then we’ll do DI water rinse, air dry, and finally use oxygen plasma to final clean the glass slide. What acidic aqueous solution and basic aqueous solution can you suggest?

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